Semiconductor device and method of manufacturing the semiconductor device

ABSTRACT

A method of manufacturing a semiconductor device includes forming a first region including a FinFET (Fin Field Effect Transistor), forming a second region including a PlanarFET (Planar Field Effect Transistor), forming first extension regions in the plurality of fins in the first region, forming second extension regions in the second region using the second gate electrode as a mask, forming first side walls and second side walls on side surfaces of the first gate electrode and on side surfaces of the second gate electrode, respectively, and forming a source and a drain of the FinFET in the first region using the first gate electrode and first side walls as masks and forming a source and a drain of the PlanarFET in the second region by an ion implantation method using the second gate electrode and second side walls as masks, at the same time.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present application is a Continuation application of U.S. patentapplication Ser. No. 12/662,498, filed Apr. 20, 2010, the entirecontents of which is incorporated herein by reference, and claimspriority from Japanese Patent Application No. 2009-104723, filed Apr.23, 2009, the entire contents of which is incorporated herein byreference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor device and a method ofmanufacturing the semiconductor device and, in particular, to asemiconductor device including a field effect transistor and a method ofmanufacturing the semiconductor device.

2. Description of Related Art

A FinFET (Fin Field Effect Transistor) has been known as one of fieldeffect transistors. The FinFET has a device structure considered to bepromising in a device using the technology of the 22 nm-node andthereafter. The FinFET has the following merits that the FinFET hashigher resistance to short channel effect and can reduce randomvariations in impurities as compared with a Planar FET (Planar FieldEffect Transistor). In this manner, the FinFET has an advantage inconstructing a transistor having a very small gate length and hence hasbeen developed with the progress of fine miniaturization of LSI (LargeScale Integration) circuit.

As one example of the Fin FET, a semiconductor device and a method ofmanufacturing the same are disclosed in Japanese Patent Publication No.JP2005-86024A (patent literature 1 corresponding to U.S. Pat. No.7,129,550(B2)). This semiconductor device includes: a semiconductorsubstrate; a semiconductor layer formed on the semiconductor substrateand shaped like a fin that is long in a first direction and that isshort in a second direction intersecting the first direction; a gateinsulating layer formed on a side surface of the second direction of thesemiconductor layer; a gate electrode arranged next to the gateinsulating layer; a channel region formed at a position adjacent to thegate insulating layer in the semiconductor layer; source/drain extensionregions formed at positions adjacent in the first direction to thechannel region in the semiconductor layer; and source/drain regionsformed at positions adjacent in the first direction to the source/drainextension regions in the semiconductor layer. The semiconductor deviceis characterized in that the width in the second direction of thesemiconductor layer in the channel region is narrower than the width inthe second direction of the semiconductor layer in the source/drainregions.

Further, as a relating technology, a technology of a FinFET is disclosedin “FinFET Performance Advantage at 22 nm: An AC perspective” by M.Guillorn, et al., 2008 Symposium on VLSI Technology Digest of TechnicalPapers, pp. 12-13 (2008) (non-patent literature 1). This literaturediscloses a fact that one disadvantage of the FinFET is large parasiticresistance. The literature also discloses a technology for epitaxiallygrowing silicon in the source/drain regions (SD regions) to reduce theparasitic resistance as a method of solving the disadvantage.

Still further, as another relating technology, a hybrid planar andFinFETCMOS device is disclosed in Japanese Patent PublicationJP2005-19996A (patent literature 2 corresponding to U.S. Pat. No.6,911,383 (B2)). A method for forming this integrated semiconductorcircuit includes: a step of providing a silicon-on-insulator structureincluding at least one top semiconductor layer arranged on an embeddedinsulating layer, the top semiconductor layer including at least onepatterned hard mask arranged in a FinFET region of the structure and atleast one patterned hard mask arranged in a FET region of the structure;a step of protecting the FET region and trimming the at least onepatterned hard mask in the FinFET region; a step of etching such anexposed portion of the top semiconductor layer that is not protected bythe hard mask stopping over the embedded insulating layer to therebyform a FinFET activating device region and a FET activating deviceregion, the FinFET activating device region being vertical to the FETactivating device region; a step of protecting the FinFET activatingdevice region and of thinning the FET activating device region tothereby make the FET activating device region smaller in height than theFinFET activating device region; a step of forming a gate dielectric onrespective exposed vertical surfaces of the FinFET activating deviceregion and of forming a gate dielectric on an exposed horizontal surfaceof the FET activating device region; and a step of forming a patternedgate electrode on the respective exposed surfaces of the gate dielectricbody.

Still further, an integrated circuit chip and a method for manufacturingthe same are disclosed in Japanese Patent Publication No. JP2004-88101A(patent literature 3 corresponding to U.S. Pat. No. 7,163,851(B2)). Thisintegrated circuit chip includes at least one fin-type field effecttransistor and at least one thick body device. In this integratedcircuit chip, the at least one fin-type field effect transistor and theat least one thick body device are formed at the same time.

Still further, a semiconductor device and a method of manufacturing thesame are disclosed in International Publication No. WO2005/020325(patent literature 4). This semiconductor device has a MIS-type fieldeffect transistor including: a semiconductor projecting portionprojecting from a plane of a substrate; a gate electrode extending onboth opposite side surfaces from a top surface of the semiconductorprojecting portion so as to straddle the semiconductor projectingportion; an insulating film formed between the gate electrode and thesemiconductor projecting portion; and source/drain regions. Thissemiconductor device has a plurality of kinds of transistors formed asMIS-type field effect transistors in one chip, the transistors beingdifferent from each other in width W in a direction that is parallel tothe plane of the substrate in the semiconductor projecting portion belowthe gate electrode and that is vertical to a channel longitudinaldirection.

We have now discovered the following facts.

A semiconductor device is composed of a core transistor that primarilyperforms a logical operation and a high withstand voltage I/O transistorthat performs data input from and data output to the outside. A casewhere these transistors are manufactured by using a FinFET will bestudied.

In a process of forming an impurity layer, extension implant and haloimplant need to be performed not only to the top portion of a fin butalso to the side plane thereof so as to make a channel plane. However,in the case where a plurality of fins are formed, the spacing betweenthe fins is narrow and hence when a typical ion implantation apparatusis used, a shadowing effect is caused to thereby make it difficult toimplant ions. Thus, it has been studied that plasma doping is used forforming the FinFET in place of ion implantation. When the plasma dopingis used for a process of forming the impurity layer of the FinFET, evenif the spacing between the fins is narrow, impurities can be implantedinto the channel plane by dispersion and diffusion of the impurities.However, in the case where the plasma doping is used, since the plasmadoping is based on the principle of dispersion and diffusion of theimpurities, the impurities cannot be deeply implanted as compared withthe case where ion implantation is used. Thus, a mask oxide film usedfor the plasma doping needs to be made as thin as possible.

Here, the high withstand voltage I/O transistor needs to have a gateinsulating film made thicker than the core transistor. In this case,there is brought about the following state: after a fin gate is formed,the core transistor has an oxide film having a thickness of, forexample, 2 nm or less formed in the source/drain regions (SD regions)thereof but the high withstand voltage I/O transistor has an oxide film,which is thicker than that of core transistor, formed in the SD regionsthereof. In this state, the implanting of impurities into the extensionregions by the plasma doping is thought to be difficult. Therefore, inthe FinFET, it is difficult to increase the thickness of the gateinsulating film to increase the withstand voltage.

In this manner, in a semiconductor device using the technology of the 22nm-node and thereafter, the manufacturing of the core transistor and theI/O transistor by using the FinFETs is thought to be extremelydifficult.

SUMMARY

The present invention seeks to solve one or more of the above problems,or to improve upon those problems at least in part.

In one embodiment, a semiconductor device includes: a FinFET (Fin FieldEffect Transistor) configured to be provided on a chip; and a PlanarFET(Planar Field Effect Transistor) configured to be provided on the chip;wherein a second gate insulating layer of the PlanarFET is thicker thana first gate insulating layer of the FinFET.

In another embodiment, a method of manufacturing a semiconductor device,includes: providing a semiconductor substrate, the semiconductorsubstrate including: a first region where a FinFET (Fin Field EffectTransistor) is to be formed, and a second region where a PlanarFET(Planar Field Effect Transistor) is to be formed, wherein the firstregion includes: a plurality of fins formed on a substrate and parallelto each other, a first insulating film formed on the plurality of fins,a second insulating film formed on the first insulating film, and afirst conducting film formed on the second insulating film, wherein thefirst insulating film, the second insulating film, and the firstconducting film have a pattern of a first gate electrode of the FinFET,wherein the second region includes: the first insulating film formed onthe substrate, the second insulating film formed on the first insulatingfilm, and the first conducting film formed on the second insulatingfilm, wherein the first insulating film, the second insulating film, andthe first conducting film have a pattern of a second gate electrode ofthe PlanarFET wherein a thickness of the first insulating film in thesecond region is larger than a thickness thereof in the first region;forming first extension regions in the plurality of fins in the firstregion by a plasma doping method using the first gate electrode as amask; forming second extension regions in the second region by one of anion implantation method and a plasma doping method using the second gateelectrode as a mask; forming first side walls and second side walls onside surfaces of the first gate electrode and on side surfaces of thesecond gate electrode, respectively; and forming a source and a drain ofthe FinFET in the first region by an ion implantation method using thefirst gate electrode and first side walls as masks and forming a sourceand a drain of the PlanarFET in the second region by anion implantationmethod using the second gate electrode and second side walls as masks,at the same time.

The semiconductor device according to the present invention can reduce achip area by fine miniaturization using FinFETs, while keeping andimproving characteristics required for each element.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other objects, advantages and features of the presentinvention will be more apparent from the following description ofcertain preferred embodiments taken in conjunction with the accompanyingdrawings, in which:

FIG. 1 is a plan view showing a structure of a semiconductor deviceaccording to an embodiment of the present invention;

FIG. 2A is a section view along the line AA′ in FIG. 1 showing thestructure of the semiconductor device according to the embodiment of thepresent invention;

FIG. 2B is a section view along the line BB′ in FIG. 1 showing thestructure of the semiconductor device according to the embodiment of thepresent invention;

FIG. 2C is a section view along the line CC′ in FIG. 1 showing thestructure of the semiconductor device according to the embodiment of thepresent invention;

FIG. 3 is a plan view showing a structure of the semiconductor deviceaccording to the embodiment of the present invention;

FIG. 4 is a section view along the line DD′ in FIG. 3 showing thestructure of the semiconductor device according to the embodiment of thepresent invention;

FIG. 5A is a section view showing a method of manufacturing thesemiconductor device according to the embodiment of the presentinvention;

FIG. 5B is a section view showing the method of manufacturing thesemiconductor device according to the embodiment of the presentinvention;

FIG. 5C is a section view showing the method of manufacturing thesemiconductor device according to the embodiment of the presentinvention;

FIG. 5D is a section view showing the method of manufacturing thesemiconductor device according to the embodiment of the presentinvention;

FIG. 6A is a section view showing the method of manufacturing thesemiconductor device according to the embodiment of the presentinvention;

FIG. 6B is a section view showing the method of manufacturing thesemiconductor device according to the embodiment of the presentinvention;

FIG. 6C is a section view showing the method of manufacturing thesemiconductor device according to the embodiment of the presentinvention;

FIG. 6D is a section view showing the method of manufacturing thesemiconductor device according to the embodiment of the presentinvention;

FIG. 7A is a section view showing the method of manufacturing thesemiconductor device according to the embodiment of the presentinvention;

FIG. 7B is a section view showing the method of manufacturing thesemiconductor device according to the embodiment of the presentinvention;

FIG. 7C is a section view showing the method of manufacturing thesemiconductor device according to the embodiment of the presentinvention;

FIG. 7D is a section view showing the method of manufacturing thesemiconductor device according to the embodiment of the presentinvention;

FIG. 8A is a section view showing the method of manufacturing thesemiconductor device according to the embodiment of the presentinvention;

FIG. 8B is a section view showing the method of manufacturing thesemiconductor device according to the embodiment of the presentinvention;

FIG. 8C is a section view showing the method of manufacturing thesemiconductor device according to the embodiment of the presentinvention;

FIG. 8D is a section view showing the method of manufacturing thesemiconductor device according to the embodiment of the presentinvention;

FIG. 9A is a section view showing the method of manufacturing thesemiconductor device according to the embodiment of the presentinvention;

FIG. 9B is a section view showing the method of manufacturing thesemiconductor device according to the embodiment of the presentinvention;

FIG. 9C is a section view showing the method of manufacturing thesemiconductor device according to the embodiment of the presentinvention;

FIG. 9D is a section view showing the method of manufacturing thesemiconductor device according to the embodiment of the presentinvention;

FIG. 10 is a section view showing a modification of the structure of thesemiconductor device according to the embodiment of the presentinvention;

FIG. 11 is a section view showing another modification of the structureof the semiconductor device according to the embodiment of the presentinvention;

FIG. 12 is a section view along the line AA′ showing another structureof the semiconductor device according to the embodiment of the presentinvention;

FIG. 13 is a section view along the line DD′ showing the anotherstructure of the semiconductor device according to the embodiment of thepresent invention;

FIG. 14 is a section view along the line AA′ showing still anotherstructure of the semiconductor device according to the embodiment of thepresent invention; and

FIG. 15 is a section view along the line DD′ to show the still anotherconstruction of the semiconductor device according to the embodiment ofthe present invention.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

The invention will be now described herein with reference toillustrative embodiments. Those skilled in the art will recognize thatmany alternative embodiments can be accomplished using the teachings ofthe present invention and that the invention is not limited to theembodiments illustrated for explanatory purposed.

Hereinafter, a semiconductor device according to an embodiment of thepresent invention and a method of manufacturing the semiconductor devicewill be described.

The semiconductor device of the present invention includes FinFETs andPlanarFETs formed together on a same chip. In other words, on the samechip, a transistor that needs to be operated at a high operation speedand to be finely miniaturized (exemplified by a primitive transistor fora logical device and a cell transistor for an SRAM) is configured usinga FinFET, and a transistor that needs to have a gate insulating filmwith high withstand voltage (exemplified by a transistor for an analogsystem or an I/O system) is configured using a PlanarFET. Herein, a FETis exemplified by a MOS (Metal Oxide Semiconductor) FET. The employmentof this configuration can realize the FinFET, which is operated at ahigh operation speed and is finely miniaturized, and the PlanarFET forI/O system, which has a gate insulating film with high withstandvoltage, on one chip. In this case, it is preferable that the FinFET hasa relatively short gate length. This is because the relatively shortgate length is easy to fulfill the abovementioned characteristics of theFinFET. On the other hand, even if the PlanarFET has a relatively longgate length, the PlanarFET presents no problem. This is because thePlanarFET is operated at a relatively slow operation speed. Hereinafter,the FinFET and the PlanarFET will be described in detail.

First, the FinFET will be described. FIG. 1 is a plan view showing astructure of the semiconductor device according to an embodiment of thepresent invention. FIGS. 2A to 2C are section views along the lines AA′,BB′ and CC′ in FIG. 1, respectively. A FinFET 10 includes asemiconductor substrate 11, a source 18(S), a drain 18(D) a gateelectrode 15, extension regions 17, a gate insulating layer 14, sidewalls 16, and offset spacers 62.

The semiconductor substrate 11 is a semiconductor layer of a firstconduction type (e.g., p type). The semiconductor substrate 11 isexemplified by silicon. The semiconductor substrate 11 includes regionsformed for a source (S) and a drain (D) and a plurality of fins 19formed for a channel region. The regions formed for the source and thedrain are formed in the shape of a plate of rectangular solid and arearranged side by side in X direction. Each of the plurality of fins 19is formed in the shape of a fin of rectangular solid and is extended inX direction. The plurality of fins 19 is arranged side by side inparallel to each other in Y direction. Each of the plurality of fins 19is connected to the region formed for the source at one end and isconnected to the region formed for the drain at the other end.

The source 18(S) and the drain 18(D) are the semiconductor layers of asecond conduction type (e.g., n type). They are formed in surfaceregions formed for the source and the drain in the semiconductorsubstrate 11, respectively. The source 18(S) is further extended to thebottom of the side wall 16 on the source 18(S) side of the surfaceregions of the plurality of fins 19. The drain 18(D) is further extendedto the bottom of the side wall 16 on the drain 18(D) side of the surfaceregions of the plurality of fins 19.

The extension region 17 is a semiconductor layer of the secondconduction type (e.g., n type) having a lower concentration than theconcentrations of the source 18(S) and the drain 18(D). The extensionregion 17 is formed on the surface region of each of the plurality offins 19, is extended from the tip of the source 18(S) or the drain 18(D)to the bottoms of the side wall 16 and the offset spacer 62, and isslightly overlaid on a channel region. A region, which is the surfaceregion of each of the plurality of fins 19 and is arranged between theextension region 17 on the source (S) side and the extension region 17on the drain (D) side, becomes a channel region 50 (50 a, 50 b).

The gate insulating layer 14 is formed so as to cover the channel region50 and includes a first insulating layer 12 and a second insulatinglayer 13. The first insulating layer 12 is formed on the channel region50. The second insulating layer 13 is formed on the first insulatinglayer 12. The first insulating layer 12 is exemplified by silicon oxide(SiOx) and is formed in a film thickness of, for example, 0.5 nm. Thesecond insulating layer 13 is formed of a high dielectric constantmaterial (High-k), is exemplified by hafnium nitride silicate (HfSiOxNy)or hafnium oxide (HfOz), and is formed in a film thickness of, forexample, 2 nm.

The gate electrode 15 is formed on the gate insulating layer 14. Thegate layer 15 is extended in Y direction and is formed so as to coverthe plurality of fins 19. In other words, the gate electrode 15 isconnected to the plurality of fins 19 via the gate insulating layer 14.The surface region of the fin 19 connected to the gate electrode 15 viathe gate insulating layer 14 becomes the channel region 50 (50 a, 50 b).The gate electrode 15 is exemplified by a metal, titan nitride(TiN)/amorphous silicon layer or the like. A gate length Lg1 is a lengthof the channel region 50 in the fin 19 in the X direction(substantially, the width of the gate electrode 15).

The side wall 16 is formed so as to cover the extension region 17 andthe side wall of the gate electrode 15 and so as to cover the side wallof the fin 19. The side wall 16 is exemplified by silicon nitride (SiNy)or a laminated film of silicon nitride and silicon oxide (SiNy/SiOx).Moreover, the offset spacer 62 is formed between the side wall 16 andthe gate electrode 15. The offset spacer 62 is exemplified by a siliconnitride (SiNy) film having a thickness of 3 to 5 nm.

Next, the PlanarFET 20 will be described. FIG. 3 is a plan view showinga structure of the semiconductor device according to the embodiment ofthe present invention. FIG. 4 is a section view along the line DD′ inFIG. 3, a MOS transistor exemplifies The PlanarFET 20. The PlanarFET 20includes a semiconductor substrate 21, a source 28(S), a drain 28(D), agate electrode 25, extension regions 27, a gate insulating layer 24,side walls 26, and offset spacers 65.

The semiconductor substrate 21 is a semiconductor layer of the firstconduction type (e.g., p type). The semiconductor substrate 21 isexemplified by silicon.

The source 28(S) and the drain 28(D) are the semiconductor layers of thesecond conduction type (e.g., n type) and are formed on the surfaceregion of the semiconductor substrate 21. The source 28(S) is extendedto the bottom of the side wall 26 on the source 28(S) side in thesurface region. The drain 28(D) is extended to the bottom of the sidewall 26 on the drain 28(D) side in the surface region.

The extension region 27 is a semiconductor layer of the secondconduction type (e.g., n type) having a lower concentration than theconcentrations of the source 28(S) and the drain 28(D). The extensionregion 27 is formed on the surface region of the semiconductor substrate21, is extended from the tip of the source 28(S) or the drain 28(D) tothe bottoms of the side wall 26 and the offset spacer 65, and isslightly overlaid on a channel region. A region, which is the surfaceregion of the semiconductor substrate 21 and is arranged between theextension region 27 on the source (S) side and the extension region 27on the drain (D) side, becomes a channel region 51.

The gate insulating layer 24 is formed so as to cover the channel region51 and the extension regions 27 and includes a first insulating layer 22and a second insulating layer 23. The first insulating layer 22 isformed on the channel region 51 and the extension regions 27. The secondinsulating layer 23 is formed on the first insulating layer 22 above thechannel region 51 and on the first insulating layer 22 above the endportions of the extension regions 27. The first insulating layer 22 isexemplified by oxide silicon (SiOx) and is formed in a film thicknessof, for example, 7 nm. The second insulating layer 23 is formed of ahigh dielectric constant material (High-k), is exemplified by hafniumnitride silicate (HfSiOxNy) or hafnium oxide (HfOz), and is formed in afilm thickness of, for example, 2 nm.

The gate electrode 25 is formed on the gate insulating layer 24 (on thesecond insulating layer 23 above the channel region 51). The gateelectrode 25 is formed so as to extend in Y direction. The surfaceregion of the semiconductor substrate 21 connected to the gate electrode25 via the gate insulating layer 24 becomes the channel region 51. Thegate electrode 25 is exemplified by a metal, titan nitride(TiN)/amorphous silicon layer or the like. A gate length Lg2 is a lengthof the channel region 51 in the semiconductor substrate 21 in the Xdirection (substantially, the width of the gate electrode 25).

The side wall 26 is formed so as to cover the side wall of the gateelectrode 25 and the first insulating layer 22 (on the extension region27). The side wall 26 is exemplified by silicon nitride (SiNy) or alaminated film of silicon nitride and silicon oxide (SiNy/SiOx). Theoffset spacer 65 is formed between the side wall 26 and the gateelectrode 25. The offset spacer 65 is exemplified by a silicon nitride(SiNy) film having a thickness of 3 to 5 nm.

The FinFET 10 has the following merit: when the FinFET 10 is comparedwith the PlanarFET 20, the FinFET 10 can have higher resistance to shortchannel effect and can further reduce random variations. Thus, in thisembodiment, it is preferable that a transistor (for example, a primitivetransistor for a logical device and a cell transistor of an SRAM), whichis short in the gate length and is small in the film thickness of thegate insulating layer, is configured using the FinFET. Thisconfiguration can promote the fine miniaturization of the transistorwith high performance.

On the other hand, the PlanarFET 20 has the following merit: when thePlanarFET 20 is compared with the FinFET 10 that has a three-dimensionaldevice structure and that hence is hard to be manufactured, thePlanarFET 20 is easily manufactured and is excellent particularly in thequality of the gate insulating layer. For example, the PlanarFET 20 hasa uniform gate insulating layer and does not cause such an electricfield concentration at the corner of the channel region that appears inthe FinFET 10. Thus, in this embodiment, it is preferable that atransistor (for example, a transistor for an analog or I/O system),which is long in the gate length and is large in the film thickness ofthe gate insulating layer, is configured using the PlanarFET. Thisconfiguration can produce the high resistance (reliability) of the gateinsulating film of the transistor.

The employment of this configuration can realize the fine miniaturizedFinFET having high performance and the PlanarFET for I/O system having agate insulating film with high withstand voltage on one chip.

Next, the method of manufacturing the semiconductor device according tothe present invention will be described. FIGS. 5A-5D to 9A-9D aresection views showing the method of manufacturing the semiconductordevice according to the embodiment of the present invention. Here, FIGS.5A, 6A, 7A, 8A, and 9A are section views along the line AA′ in FIG. 1.FIGS. 5B, 6B, 7B, 8B, and 9B are section views along the line BB′ inFIG. 1. FIGS. 5C, 6C, 7C, 8C, and 9C are section views along the lineCC′ in FIG. 1. These views show the process of forming the FinFET 10.FIGS. 5D, 6D, 7D, 8D, and 9D are section views along the line D-D′ inFIG. 3. These views show the process of forming the PlanarFET 20. TheFinFET 10 and PlanarFET 20 are formed on a same chip. FIGS. 5A, 5B, 5C,and 5D show the states of the respective portions at the same timing inthe method of manufacturing the semiconductor device. FIGS. 6A, 6B, 6C,and 6D show the states of the respective portions at the same timing inthe method of manufacturing the semiconductor device. FIGS. 7A, 7B, 7C,and 7D show the states of the respective portions at the same timing inthe method of manufacturing the semiconductor device. FIGS. 8A, 8B, 8C,and 8D show the states of the respective portions at the same timing inthe method of manufacturing the semiconductor device. FIGS. 9A, 9B, 9C,and 9D show the states of the respective portions at the same timing inthe method of manufacturing the semiconductor device.

As shown in FIGS. 5A to 5C, firstly, in the semiconductor substrate 11(e.g., p type silicon), regions for a source (S) and a drain (D) and aplurality of fins 19 for a channel are formed in a region (first region)where the FinFET 10 is formed. Here, the regions for the source (S) andthe drain (D) are formed nearly in the shape of a plate of rectangularsolid, respectively, and are arranged side by side in X direction. Eachof the plurality of fins 19 is formed in the shape of a fin ofrectangular solid and is extended in X direction. The plurality of fins19 are arranged side by side in parallel with each other in Y direction.Each of the plurality of fins 19 is connected to the region for thesource (S) at one end and is connected to the region of drain (D) at theother end. Next, a first insulating film 12 a (e.g., silicon oxide) isformed, for example, in a thickness of about 0.5 nm by an ISSG (In-SituSteam Generation) oxidation method so as to cover the semiconductorsubstrate 11. Subsequently, a second insulating film 13 a (e.g., hafniumnitride silicate) is formed, for example, in a thickness of about 2 nmby a CVD method so as to cover the first insulating film 12 a. Next, agate electrode film 15 a is formed, for example, in a thickness of about40 to 45 nm by a sputtering method. As for the gate electrode film, forexample, a laminated film is used which includes a TiN layer having athickness of 5 nm and an amorphous silicon layer having a thickness of40 nm formed on the TiN layer. The reason why the structure that theamorphous silicon layer is laminated on the TiN layer is employed is toprevent the TiN layer from being etched by a SPM (Sulfuric acid HydrogenPeroxide) solution of a solution to remove resist used for forming theextension region, which will be described later. As for another gateelectrode film, for example, a single layer formed of W, TaSi, or TaSiNcan be used. These metals do not present the problem that they areetched by the solution to remove the resist and hence the surface of thegate electrode film formed of these metals does not need to be coveredwith the amorphous silicon film.

On the other hand, as shown in FIG. 5D, in the semiconductor substrate21 (e.g., p type silicon), a first insulating film 22 a (e.g., siliconoxide) is formed, for example, in a thickness of about 7 nm by the ISSGoxidation method in a region (second region) where the PlanarFET 20 isformed so as to cover the semiconductor substrate 21. Subsequently, asecond insulating film 23 a (e.g., hafnium nitride silicate) is formed,for example, in a thickness of about 2 nm by the CVD method so as tocover the first insulating film 22 a. Next, a gate electrode film 25 a(e.g., titanium nitride) is formed, for example, in a thickness of about40 to 45 nm by the sputtering method. As for the gate electrode film,for example, a laminated film is used which includes a TiN layer havinga thickness of 5 nm and an amorphous silicon layer having a thickness of40 nm formed on the TiN layer. The reason why the structure that theamorphous silicon layer is laminated on the TiN layer is employed is toprevent the TiN layer from being etched by the SPM (Sulfuric acidHydrogen Peroxide) solution of the solution to remove the resist usedfor forming the extension region, which will be described later. As forthe other gate electrode film, for example, a single layer formed of W,TaSi, or TaSiN can be used. These metals do not present the problem thatthey are etched by the solution to remove the resist and hence thesurface of the gate electrode film formed of these metals does not needto be covered with the amorphous silicon film.

Here, the semiconductor substrate 11 and the semiconductor substrate 21are the same substrate. First, the first insulating film 22 a is formed,and then the first insulating film 22 a in the second region is coveredwith the resist or the like, and then only the first insulating film 22a in the first region is removed by wet etching. Subsequently, the firstinsulating film 12 a of a thin film is formed, and then the secondinsulating film 13 a and the second insulating film 23 a are formed. Inthis case, the second insulating film 13 a and the second insulatingfilm 23 a are the same film. In other words, the laminated film formedof the first insulating film 12 a and the second insulating film 13 a inthe first region is relatively thin as a whole, while the laminated filmformed of the first insulating film 22 a and the second insulating film23 a in the second region is relatively thick as a whole. As a result,the gate insulating film 14 a for the FinFET becomes thin (for example,about 2.5 nm) as a whole, whereas the gate insulating film 24 a for thePlanarFET becomes thick (for example, about 9 nm) as a whole. In thecase where the gate electrode film 15 a is the same as the gateelectrode film 25 a, these gate electrode films 15 a, 25 a are formed ofthe same film by the same process. In the second region, an oxidationatmosphere forming the second insulating film is additionally applied tothe first insulating film 22 a, but because the first insulating film 22a is relatively thicker than the first insulating film 12 a and thegrowth of the first insulating film 22 a is saturated, the gate oxidefilm 24 a can be regarded as a laminated layer formed substantially ofthe first insulating film 22 a and the second insulating film 23 a asshown in the drawing.

Next, as shown in FIGS. 6A to 6C, the gate electrode film 15 a is etchedin a specified gate pattern by photolithography and RIE (Reactive IonEtching). With this etching, the gate electrode 15 is formed so as toextend in Y direction and to cover the plurality of fins 19. With thisetching, the second insulating film 13 a not covered with the gateelectrode 15 on the top surface (including the top surfaces of the fins19) of the semiconductor substrate 11 is also etched, whereby the secondinsulating layer 13 is formed directly below the gate electrode 15.Here, the second insulating film 13 a on the side of the fin 19 is left.

On the other hand, as show in FIG. 6D, the gate electrode film 25 a isetched in a specified pattern by the RIE. With this etching, the gateelectrode 25 is formed so as to extend in Y direction. With thisetching, the second insulating film 23 a not covered with the gateelectrode 25 on the top surface of the semiconductor substrate 21 isalso etched, whereby the second insulating layer 23 is formed directlybelow the gate electrode 25. Here, the gate electrode 15 and the secondinsulating layer 13, and the gate electrode 25 and the second insulatinglayer 23 are formed by the same process.

Next, as shown in FIGS. 7A to 7C, the second insulating film 13 a on theside of the fin 19 is removed by wet etching. At that time, the firstinsulating film 12 a exposed by removing the second insulating film 13 aand the first insulating film 12 a originally exposed are also removedat the same time. With this wet etching, the first insulating layer 12is formed directly below the second insulating layer 13 which is formeddirectly below the gate electrode 15. Subsequently, a silicon nitridefilm is formed in a thickness of 3 nm and is etched back by the RIE toform the offset spacers 62. Then, halo implant (e.g., B ion) andextension implant (e.g., As ion) are performed to the surface regions ofthe fins 19 of the semiconductor substrate 11 by plasma doping with thegate electrode 15 used as a mask. As a result, the extension regions 17are formed on the surface regions of the fins 19 of the semiconductorsubstrate 11 except for a region directly below the gate electrode 15.When the plasma doping is used, impurity ions are implanted into thesurface regions of the fins 19, which will become channel surfaces, onthe principle of dispersion and diffusion. However, the halo implant maybe omitted according to device characteristics.

In the doping of the ions, the offset spacer 62 of a thin insulatingfilm exists only in a portion (side wall portion) of the surface regionof the fin 19. Thus, even if the plasma doping that uses the principleof dispersion and diffusion and that is relatively low in energy levelis used, the impurity ions can be reliably implanted. Moreover, sincethe spacing between the fins 19 is narrow, the implantation of theimpurity ions by a conventional ion implantation apparatus easily causesshadowing. On the other hand, in the present invention, the plasmadoping using the principle of dispersion and diffusion dose not causethe shadowing, whereby the impurity ions can be certainly implanted.

On the other hand, as shown in FIG. 7D, the surface of the firstinsulating film 22 a exposed to the surface is partially etched by thewet etching shown in FIGS. 7A to 7C. However, since the film thicknessof the first insulating film 22 a is thicker than the film thickness ofthe first insulating film 12 a, the most portion of the first insulatingfilm 22 a is left in this wet etching process and hence the firstinsulating layer 22 is formed as shown in FIG. 7D. Subsequently, asilicon nitride film is formed in a thickness of 3 nm and is etched backby the RIE to form the offset spacers 65. This process is performed atthe same time of forming the offset spacers 62 shown in FIGS. 7A to 7C.Then, halo implant (e.g., B ion) and extension implant (e.g., As ion)are performed to the surface region of the semiconductor substrate 21 bythe ion implantation or the plasma doping with the gate electrode 25used as a mask. As a result, the extension regions 27 are formed on thesurface region of the semiconductor substrate 21 except for a regiondirectly below the gate electrode 25.

However, the wet etching of the first insulating film 12 a and the firstinsulating film 22 a is performed by the same process. On the otherhand, the extension regions 17 and the extension regions 27 are formedseparately by the use of a resist mask. For example, a region (firstregion), in which the FinFET 10 is to be formed, is subjected to theplasma doping with a region (second region), in which the PlanarFET 20is to be formed, masked by resist. Next, the resist is removed and theregion (second region), in which the PlanarFET 20 is to be formed, issubjected to the ion implantation or the plasma doping with the region(first region), in which the FinFET 10 is to be formed, masked byresist. Finally, the resist is removed. In the process of removing theresist, the SPM solution is used as the liquid for removing the resist,and hence when the TiN layers of the gate electrodes 15, 25 are exposed,the TiN layers are etched off. To prevent the TiN layers from beingetched off, in the gate electrodes 15, 25, the top surfaces of the TiNlayers are covered with the amorphous silicon layers and the sidesurfaces of the TiN layers are covered with the offset spacers 62, 65.This prevents the TiN layers from being etched off.

Next, as shown in FIGS. 8A to 8C, an offset film 16 a (e.g., siliconnitride) is formed, for example, in a film thickness of about 20 nm bythe CVD method so as to cover the semiconductor substrate 11 and thegate electrode 15.

On the other hand, as shown in FIG. 8D, an offset film 26 a (e.g., bysilicon nitride) is formed, for example, in a film thickness of about 20nm by the CVD method so as to cover the semiconductor substrate 21 andthe gate electrode 25.

Here, the offset film 16 a and the offset film 26 a are formed by thesame process and of the same film.

Next, as shown in FIGS. 9A to 9C, the offset film 16 a is etched back toform the side walls 16 on the side surfaces of the gate electrode 15.Then, impurity implantation (e.g., As ion) for a diffusion layer isperformed into the surface region of the semiconductor substrate 11 byion implantation with the gate electrode 15 used as a mask. As a result,the source (S) 18 and the drain (D) 18 are formed in the surface regionof the semiconductor substrate 11 except for a portion directly belowthe gate electrode 15 and the side walls 16.

On the other hand, as shown in FIG. 90, the offset film 26 a is etchedback to form the side walls 26 on the side surfaces of the gateelectrode 25. Then, impurity implantation (e.g., As ions) for adiffusion layer is performed into the surface region of thesemiconductor substrate 21 by ion implantation with the gate electrode25 used as a mask. As a result, the source (S) 28 and the drain (D) 28are formed in the surface region of the semiconductor substrate 21except for a portion directly below the gate electrode 25 and the sidewalls 26.

Here, the offset film 16 a and the offset film 26 a are etched back bythe same process. Further, the source (S) 18 and the drain (D) 18 andthe source (S) 28 and the drain (D) 28 are formed by the same process.

By the process described above, the method of manufacturing thesemiconductor device according to the embodiment of the presentinvention, which forms the FinFET 10 and the PlanarFET 20 on the samechip, can be performed.

In the method of manufacturing the semiconductor device described above,the silicon nitride film is formed in a thickness of 3 nm and is thenetched back by the RIE to form the offset spacers 62, 65 on the sidewalls of the gate electrodes 15, 25, as an example. However, it may beemployed that the offset spacers 62, 65 are formed only by forming thesilicon nitride film without etching-back the silicon nitride film bythe RIE. In this case, the process of etching-back the silicon nitridefilm is eliminated, so that there is provided an advantage that the fin19 having the extension implant regions 17 formed thereon does not havea layer damaged by dry etching. In this case, the section view of theFinFET 10 along the line AA′ in FIG. 1 is shown in FIG. 12. Further, thesection view of the PlanarFET 20 along the line DD′ in FIG. 1 is shownin FIG. 13. In this case, when the side walls 16, 26 on the side wallsof the gate electrodes 15, 25 are formed, the silicon nitride film isetched back and is formed in the shape of the offset spacers 62, 65.

Further, in the case where the gate electrodes 15, 25 are formed of asingle layer film made of W, TaSi, or TaSiN, there is no possibilitythat the gate electrode is etched by the resist removing solution suchas the SPM solution or the like. Thus, the offset spacers 62, 65 may beomitted. In this case, the section view of the FinFET 10 along the lineAA′ in FIG. 1 is shown in FIG. 14 and the section view of the PlanarFET20 along the line DD′ in FIG. 1 is shown in FIG. 15.

In this regard, the FinFET 10 is larger in parasitic resistance than thePlanarFET 20. To avoid this, it may be employed that a structure thatsilicon is epitaxially grown on the regions of the source (S) 18 and thedrain (D) 18. This structure is shown in FIG. 10. That is, FIG. 10 is asection view showing a modification of the structure of thesemiconductor device according to the embodiment of the presentinvention. FIG. 10 corresponds to the section view along the line AA′ inFIG. 1. A silicon epitaxial layer 31 having a film thickness of Tepi isformed on the regions of the source (S) 18 and the drain (D) 18. Thisstructure can reduce the parasitic resistance in the FinFET 10 (seenon-patent literature 1). On the other hand, one of the defects causedwhen silicon is epitaxially grown is an increase in parasiticcapacitance between the gate electrode and the source and the drain. Inthe PlanarFET 20 having a relatively long gate length, channelresistance is not so low and the contribution of parasitic resistance issmall. Thus, it is desired from the viewpoint of characteristics of thedevice that silicon is epitaxially grown only for the FinFET 10 so as toreduce the parasitic resistance. In other words, it is preferable toadopt such a structure that silicon is epitaxially grown for the FinFET10 and that silicon is not epitaxially grown for the PlanarFET 20.

Further, in the FinFET 10, an insulating layer may be formed on the topof the fin 19. This structure is shown in FIG. 11. FIG. 11 is a sectionview showing another modification of the structure of the semiconductordevice according to the embodiment of the present invention. FIG. 11corresponds to a section view along the line BB′ in FIG. 1. Aninsulating layer 34 (e.g., silicon oxide or silicon nitride) is formedon the top of the fin 19. This structure can limit the channel region inthe fin 19 only to the side surfaces thereof. This structure is thoughtto be effective in the case where a carrier mobility in the channelregion at the surface orientation of the side surface is higher than acarrier mobility in the channel region at the surface orientation of thetop surface. For example, when the FinFET 10 made of p type silicon hasthe top surface of a surface orientation (100) and the side surface of asurface orientation (110), the carrier mobility of the channel region ofthe surface orientation (110) is about 1.5 times the carrier mobility ofthe channel region of the surface orientation (100). Thus, when theinsulating layer 34 is formed on the top surface of the surfaceorientation (100), the insulating layer 34 is resistant to having a gatevoltage applied thereto. Thus, the top surface of the surfaceorientation (100) is not used as the channel region, but only the sidesurface of the surface orientation (110) can be used as the channelregion.

In the case where the semiconductor device is configured using theFinFET only, it is very difficult to realize a high-withstand voltagetransistor for the I/O system. This is because since the FinFET has achannel formed in a three-dimensional structure and hence has a cornerin the channel, the insulating film formed in the corner of the channelhas a low withstand voltage and hence cannot realize a high withstandvoltage. On the other hand, in the case where the semiconductor deviceis configured using the PlanarFET only, a high performance fineminiaturized transistor that has high resistance to short channel effectand small random variations cannot be realized.

However, according to the present invention, the FinFET and thePlanarFET can be formed together on the same chip. That is, thetransistor having a short gate length is configured using the FinFET.This can realize the high performance fine miniaturized transistor thathas high resistance to short channel effect and small random variations.On the other hand, the transistor (that has a thick gate insulatingfilm) for the I/O system or the analog system that has a long gatelength and that needs to have a high withstand voltage is configuredusing the PlanarFET. This structure eliminates the need for formingalong fin that is hard to make from the viewpoint of manufacture (in thecase of forming a transistor having a long gate length, a long fininevitably needs to be formed) and hence can realize such a transistorfor the I/O system or the analog system that has a long gate length anda thick gate insulating film. As a result, the semiconductor device canreduce a chip area by fine miniaturization while keeping or improvingcharacteristics required of each element.

Further, in the present invention, it is preferable to employ thefollowing structure: in the FinFET, silicon is epitaxially grown on theregions of the source and the drain to swell up the regions of thesource and the drain, whereas in the PlanarFET, silicon is notepitaxially grown. This structure can prevent an increase in theparasitic capacitance between the gate electrode and the source and thedrain in the PlanarFET and at the same time can reduce the parasiticresistance in the FinFET.

It will be apparent that the present invention is not limited to therespective embodiments described above and the embodiments can bechanged or modified as appropriate within the scope of the technicalidea of the present invention. Moreover, the abovementioned techniquescan be combined appropriately with each other as far as the combinationof the techniques does not raise contradiction. For example, thetechniques described in FIG. 10 and FIG. 11 can be combined with theother structures (shown in FIG. 2A/FIG. 4, FIG. 12/FIG. 13, and FIG.14/FIG. 15).

It is apparent that the present invention is not limited to the aboveembodiment, but may be modified and changed without departing from thescope and spirit of the invention.

Although the present invention has been described above in connectionwith several exemplary embodiments thereof, it would be apparent tothose skilled in the art that those exemplary embodiments are providedsolely for illustrating the present invention, and should not be reliedupon to construe the appended claims in a limiting sense.

Not that the whole or part of the embodiments disclosed above can bedescribed as, but not limited to, the following appendix.

APPENDIX

1. A method of manufacturing a semiconductor device, including:

providing a semiconductor substrate, the semiconductor substrateincluding:

a first region where a FinFET (Fin Field Effect Transistor) is to beformed, and

a second region where a PlanarFET (Planar Field Effect Transistor) is tobe formed,

wherein the first region includes:

-   -   a plurality of fins formed on a substrate and parallel to each        other,    -   a first insulating film formed on the plurality of fins,    -   a second insulating film formed on the first insulating film,        and    -   a first conducting film formed on the second insulating film,    -   wherein the first insulating film, the second insulating film,        and the first conducting film have a pattern of a first gate        electrode of the FinFET,

wherein the second region includes:

-   -   the first insulating film formed on the substrate,    -   the second insulating film formed on the first insulating film,        and    -   the first conducting film formed on the second insulating film,    -   wherein the first insulating film, the second insulating film,        and the first conducting film have a pattern of a second gate        electrode of the PlanarFET

wherein a thickness of the first insulating film in the second region islarger than a thickness thereof in the first region;

forming first extension regions in the plurality of fins in the firstregion by a plasma doping method using the first gate electrode as amask;

forming second extension regions in the second region by one of an ionimplantation method and a plasma doping method using the second gateelectrode as a mask;

forming first side walls and second side walls on side surfaces of thefirst gate electrode and on side surfaces of the second gate electrode,respectively; and

forming a source and a drain of the FinFET in the first region by an ionimplantation method using the first gate electrode and first side wallsas masks and forming a source and a drain of the PlanarFET in the secondregion by an ion implantation method using the second gate electrode andsecond side walls as masks, at the same time.

2. The method of manufacturing a semiconductor device according to item1, wherein the providing step includes:

forming the first insulating film such that the first region and thesecond region are covered with the first insulating film and thethickness thereof in the second region is larger than the thicknessthereof in the first region,

forming the second insulating film and the first conducting film suchthat the first insulating film is covered with the second insulatingfilm and the second insulating film is covered with the first conductingfilm,

etching the first conducting film such that the first gate electrode isformed at the first region and the second gate electrode is formed atthe second region, and

etching the second insulating film and the first insulating film suchthat the second insulating film and the first insulating film areremoved except those under the first gate electrode in the first region,and the second insulating film and an upper part of the first insulatingfilm are removed except those under the second gate electrode in thesecond region.

3. The method of manufacturing a semiconductor device according to item1, wherein a gate length of the PlanarFET is longer than a gate lengthof the FinFET.4. The method of manufacturing a semiconductor device according to item1, further comprising:

forming a third insulating film such that the first region and thesecond region are covered with the third insulating film, after theproviding step.

5. The method of manufacturing a semiconductor device according to item4, further comprising:

etching the third insulating film to form a first offset spacer on sidesurfaces of the first gate electrode and the plurality of fins in thefirst region and to form a second offset spacer on side surfaces of thesecond gate electrode in the second region, after the step of formingthe third insulating film.

6. The method of manufacturing a semiconductor device according to item1, further comprising:

making top surfaces of a source and a drain of the FinFET swell up froma level of a boundary between the first gate insulating film and a firstchannel region,

wherein top surfaces of a source and a drain of the PlanarFET is at alevel of a boundary between the first gate insulating film and a secondchannel region.

7. The method of manufacturing a semiconductor device according to item1, further comprising:

forming an insulating portion on a top surface of each of the pluralityof fins.

8. The method of manufacturing a semiconductor device according to item1, wherein the FinFET is a core transistor, and

wherein the PlanarFET is an I/O transistor.

1. A method of manufacturing a semiconductor device, the methodcomprising: providing a semiconductor substrate, including: forming afirst region where a FinFET (Fin Field Effect Transistor) is to beformed; and forming a second region where a PlanarFET (Planar FieldEffect Transistor) is to be formed, wherein the forming of the firstregion comprises: forming a plurality of fins on a substrate andparallel to each other; forming a first insulating film on the pluralityof fins; forming a second insulating film on the first insulating film;and forming a first conducting film on the second insulating film,wherein the first insulating film, the second insulating film, and thefirst conducting film have a pattern of a first gate electrode of theFinFET, wherein the forming of the second region comprises: forming thefirst insulating film on the substrate; forming the second insulatingfilm on the first insulating film; and forming the first conducting filmon the second insulating film, wherein the first insulating film, thesecond insulating film, and the first conducting film have a pattern ofa second gate electrode of the PlanarFET, and wherein a thickness of thefirst insulating film in the second region is greater than a thicknessthereof in the first region; forming first extension regions in theplurality of fins in the first region by a plasma doping method usingthe first gate electrode as a mask; forming second extension regions inthe second region by one of an ion implantation method and a plasmadoping method using the second gate electrode as a mask; forming firstside walls and second side walls on side surfaces of the first gateelectrode and on side surfaces of the second gate electrode,respectively; and forming a source and a drain of the FinFET in thefirst region by an ion implantation method using the first gateelectrode and first side walls as masks and forming a source and a drainof the PlanarFET in the second region by an ion implantation methodusing the second gate electrode and second side walls as masks, at thesame time.
 2. The method of manufacturing a semiconductor deviceaccording to item 1, wherein the providing of the semiconductorsubstrate further comprises: forming the first insulating film such thatthe first region and the second region are covered with the firstinsulating film and the thickness thereof in the second region is largerthan the thickness thereof in the first region; forming the secondinsulating film and the first conducting film such that the firstinsulating film is covered with the second insulating film and thesecond insulating film is covered with the first conducting film;etching the first conducting film such that the first gate electrode isformed at the first region and the second gate electrode is formed atthe second region; and etching the second insulating film and the firstinsulating film such that the second insulating film and the firstinsulating film are removed except those under the first gate electrodein the first region, and the second insulating film and an upper part ofthe first insulating film are removed except those under the second gateelectrode in the second region.
 3. The method of manufacturing asemiconductor device according to item 1, wherein a gate length of thePlanarFET is greater than a gate length of the FinFET.
 4. The method ofmanufacturing a semiconductor device according to item 1, furthercomprising: forming a third insulating film such that the first regionand the second region are covered with the third insulating film, afterthe providing of the semiconductor substrate.
 5. The method ofmanufacturing a semiconductor device according to item 4, furthercomprising: etching the third insulating film to form a first offsetspacer on side surfaces of the first gate electrode and the plurality offins in the first region and to form a second offset spacer on sidesurfaces of the second gate electrode in the second region, after theforming of the third insulating film.
 6. The method of manufacturing asemiconductor device according to item 1, further comprising: making topsurfaces of a source and a drain of the FinFET swell up from a level ofa boundary between the first gate insulating film and a first channelregion, wherein top surfaces of a source and a drain of the PlanarFET isat a level of a boundary between the first gate insulating film and asecond channel region.
 7. The method of manufacturing a semiconductordevice according to item 1, further comprising: forming an insulatingportion on a top surface of each of the plurality of fins.
 8. The methodof manufacturing a semiconductor device according to item 1, wherein theFinFET comprises a core transistor, and wherein the PlanarFET comprisesan I/O (input/output) transistor.